Please use this identifier to cite or link to this item:
http://hdl.handle.net/123456789/372Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | H. Jun, J. Shin, S. Kim, | - |
| dc.date.accessioned | 2017-09-11T10:01:52Z | - |
| dc.date.available | 2017-09-11T10:01:52Z | - |
| dc.date.issued | 2017 | - |
| dc.identifier.uri | http://hdl.handle.net/123456789/372 | - |
| dc.language.iso | en | en_US |
| dc.title | Development of a virtual metrology method using plasma harmonics analysis | en_US |
| dc.type | Article | en_US |
| Appears in Collections: | E-JOURNALS | |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| plasma harmonics.pdf | 2.19 MB | Adobe PDF | View/Open |
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