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Electrical characteristics for capacitively coupled radio frequency discharges of helium and neon
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| dc.date.accessioned | 2017-11-29T08:35:51Z | |
| dc.date.available | 2017-11-29T08:35:51Z | |
| dc.date.issued | 2017 | |
| dc.identifier.uri | http://hdl.handle.net/123456789/865 | |
| dc.language.iso | en | en_US |
| dc.title | Electrical characteristics for capacitively coupled radio frequency discharges of helium and neon | en_US |
| dc.type | Article | en_US |
